Strong photoluminescence and low surface state densities on clean and silicon deposited (001) surfaces of GaAs with (4 x 6) reconstruction

被引:10
作者
Nakano, Y
Negoro, N
Hasegawa, H
机构
[1] Hokkaido Univ, Res Ctr Integrated Quantum Elect, Kita Ku, Sapporo, Hokkaido 0608628, Japan
[2] Hokkaido Univ, Grad Sch Elect & Informat Engn, Kita Ku, Sapporo, Hokkaido 0608628, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 4B期
关键词
GaAs; (4 x 6); surface state; surface passivation; Si interface control layer (Si ICL);
D O I
10.1143/JJAP.41.2542
中图分类号
O59 [应用物理学];
学科分类号
摘要
In an attempt to determine an optimum initial GaAs surface for application of the silicon interface control layer (Si ICL)-based surface passivation method, properties of the (4 x 6) reconstructed Ga-rich (001) surface of GaAs were investigated before and after Si deposition. An ultrahigh vacuum (UHV)-based multi-chamber system was used where samples were prepared by molecular beam epitaxy (MBE) and characterized by scanning tunneling microscopy (STM), X-ray photoelectron spectroscopy (XPS), UHV photoluminescence (PL), and contactless capacitance-voltage (C-V) methods. For comparison, (2 x 4) and c(4 x 4) As-rich surfaces were also prepared. STM observation clarified the microscopic structure of the (4 x 6) surface. XPS measurements confirmed the Ga-rich nature of the initial surface and detected the reduction of band bending on both initial and Si-deposited (4 x 6) surfaces. A surprisingly large band-edge PL intensity was obtained on the (4 x 6) surface, and it further increased after Si deposition, reaching as high as 8.9 times that of the (2 x 4) surface. UHV contactless C-V measurements indicated low and wide N-ss distributions on the initial and Si-deposited (4 x 6) surfaces. All the results consistently indicate that the (4 x 6) surface is the most promising surface for application of the Si ICL-based surface passivation process for GaAs.
引用
收藏
页码:2542 / 2547
页数:6
相关论文
共 27 条
[1]   Computer analysis of surface recombination process at Si and compound semiconductor surfaces and behavior of surface recombination velocity [J].
Adamowicz, B ;
Hasegawa, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1998, 37 (3B) :1631-1637
[2]   CHARACTERIZATION OF GAAS GROWN ON SI EPITAXIAL LAYERS ON GAAS SUBSTRATES [J].
ADOMI, K ;
STRITE, S ;
MORKOC, H ;
NAKAMURA, Y ;
OTSUKA, N .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (01) :220-225
[3]   Surface passivation of GaAs using an ultrathin cubic GaN interface control layer [J].
Anantathanasarn, S ;
Hasegawa, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (04) :1589-1596
[4]   A SCANNING-TUNNELING-MICROSCOPY STUDY OF THE DEPOSITION OF SI ON GAAS(001) IMPLICATIONS FOR SI DELTA-DOPING [J].
AVERY, AR ;
HOLMES, DM ;
SUDIJONO, JL ;
JONES, TS ;
FAHY, MR ;
JOYCE, BA .
JOURNAL OF CRYSTAL GROWTH, 1995, 150 (1-4) :202-208
[5]   ATOMIC-STRUCTURE OF GAAS(100)-(2X1) AND GAAS(100)-(2X4) RECONSTRUCTED SURFACES [J].
CHADI, DJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :834-837
[6]   RECONSTRUCTION AND DEFECT STRUCTURE OF VICINAL GAAS(001) AND ALXGA1-XAS(001) SURFACES DURING MBE GROWTH [J].
DAWERITZ, L ;
HEY, R .
SURFACE SCIENCE, 1990, 236 (1-2) :15-22
[7]   MARKED REDUCTION OF THE SURFACE-INTERFACE STATES OF GAAS BY (NH4)2SX TREATMENT [J].
FAN, JF ;
KURATA, Y ;
NANNICHI, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (12) :L2255-L2257
[8]   Surface passivation of In0.53Ga0.47As ridge quantum wires using silicon interface control layers [J].
Fujikura, H ;
Kodama, S ;
Hashizume, T ;
Hasegawa, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (04) :2888-2894
[9]   Effects of gap states an scanning tunneling spectra observed on (110)- and (001)-oriented clean surfaces and ultrathin Si layer covered surfaces of GaAs prepared by molecular beam epitaxy [J].
Hasegawa, H ;
Negoro, N ;
Kasai, S ;
Ishikawa, Y ;
Fujikuwa, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (04) :2100-2108
[10]   MBE growth and applications of silicon interface control layers [J].
Hasegawa, H .
THIN SOLID FILMS, 2000, 367 (1-2) :58-67