On the application of XPS to ceria films grown by MOCVD using a fluorinated precursor

被引：22

作者：

Chadwick, D ^{[1
]}

McAleese, J ^{[1
]}

Senkiw, K ^{[1
]}

Steele, BCH ^{[1
]}

机构：

[1] UNIV LONDON IMPERIAL COLL SCI TECHNOL & MED,DEPT MAT,CTR TECH CERAM,LONDON SW7 2BY,ENGLAND

来源：

APPLIED SURFACE SCIENCE | 1996年 / 99卷 / 04期

关键词：

D O I：

10.1016/0169-4332(96)00548-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

MOCVD grown CeO2 films using the precursor Ce(fod)(4) (where fod-H = 1,1,1,2,2,3,3-heptafluoro-7,7-dimethyloctane-3,5-dione) have been analysed by XPS. Residual fluorine was found to be in the form of fluoride and an organo-related fluorine species which converted rapidly to fluoride under application of the XPS technique. At the same time the CeO2 spectrum developed the presence of Ce3+. The rate of conversion was found to be sample dependent.

引用

页码：417 / 420

页数：4

共 14 条

[1]

BRIGGS D, 1990, PRACTICAL SURFACE AN, V1

[2] PULSED ORGANOMETALLIC BEAM EPITAXY OF COMPLEX OXIDE-FILMS [J].

DURAY, SJ ;

BUCHHOLZ, DB ;

SONG, SN ;

RICHESON, DS ;

KETTERSON, JB ;

MARKS, TJ ;

CHANG, RPH .

APPLIED PHYSICS LETTERS, 1991, 59 (12) :1503-1505

[3] DAMAGE TO CF3CONH-TERMINATED ORGANIC SELF-ASSEMBLED MONOLAYERS (SAMS) ON AL, TI, CU, AND AU BY AL K-ALPHA X-RAYS IS DUE PRINCIPALLY TO ELECTRONS [J].

GRAHAM, RL ;

BAIN, CD ;

BIEBUYCK, HA ;

LAIBINIS, PE ;

WHITESIDES, GM .

JOURNAL OF PHYSICAL CHEMISTRY, 1993, 97 (37) :9456-9464

[4] IN-SITU MONITORING OF SELECTIVE COPPER DEPOSITION PROCESSES IN A METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION USING FOURIER-TRANSFORM INFRARED REFLECTION-ABSORPTION SPECTROSCOPY [J].

HANAOKA, K ;

OHNISHI, H ;

TACHIBANA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (5A) :2430-2439

[5]

JENNESKENS LW, 1995, RECL TRAV CHIM PAY B, V114, P97

[6] SPONTANEOUS DECOMPOSITION OF DIMETHYL GOLD HEXAFLUOROACETYLACETONATE ON ION BOMBARDED SURFACES [J].

KIRCH, SJ ;

WAGNER, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (05) :3701-3706

[7] STRUCTURAL AND THERMAL STUDIES OF TETRAKIS(2,2,6,6-TETRAMETHYL-3,5-HEPTANEDIONATO)CERIUM(IV) [J].

LESKELA, M ;

SILLANPAA, R ;

NIINISTO, L ;

TIITTA, M .

ACTA CHEMICA SCANDINAVICA, 1991, 45 (10) :1006-1011

[8]

MCALEESE J, IN PRESS THIN SOLID

[9] CHEMICAL VAPOR-DEPOSITION OF YBA2CU3O7 USING METALORGANIC CHELATE PRECURSORS [J].

PANSON, AJ ;

CHARLES, RG ;

SCHMIDT, DN ;

SZEDON, JR ;

MACHIKO, GJ ;

BRAGINSKI, AI .

APPLIED PHYSICS LETTERS, 1988, 53 (18) :1756-1758

[10] THE ELECTRONIC-STRUCTURE OF STOICHIOMETRIC AND REDUCED CEO2 SURFACES - AN XPS, UPS AND HREELS STUDY [J].

PFAU, A ;

SCHIERBAUM, KD .

SURFACE SCIENCE, 1994, 321 (1-2) :71-80

← 1 2 →