High mobility amorphous/nanocrystalline indium zinc oxide deposited at room temperature

被引:61
作者
Fortunato, E [1 ]
Pimentel, A [1 ]
Gonçalves, A [1 ]
Marques, A [1 ]
Martins, R [1 ]
机构
[1] Univ Lisbon, Fac Sci & Technol, Mat Sci Dept CENIMAT, Lisbon, Portugal
关键词
indium zinc oxide; optical coatings; electrical properties and measurements; sputtering;
D O I
10.1016/j.tsf.2005.07.311
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper we present results of indium zinc oxide deposited at room temperature by rf magnetron sputtering, with an electron mobility as high as 60 cm(2)/Vs. The films present a resistivity as low as 5 x 10(-4) Omega cm, with an optical transmittance of 85%. The structure of these films seems to be polymorphous (mix of different amorphous and nanocrystalline phases from different origins) as detected from XRD patterns with a smooth surface and from SEM micrographs, is highly important to ensure a long lifetime when used in display devices. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:104 / 107
页数:4
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