Collector-up AlGaAs/GaAs heterojunction bipolar transistors using oxidised AlAs for current confinement

被引:9
作者
Massengale, A
Larson, MC
Dai, C
Harris, JS
机构
[1] Solid State Electronics Laboratory, 226 McCulloch Building, Stanford University, Stanford
关键词
heterojunction bipolar transistors; aluminium gallium arsenide; gallium arsenide;
D O I
10.1049/el:19960261
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors describe a novel method for fabricating collector-up AlGaAs/GaAs heterojunction bipolar transistors. An AlAs layer is inserted into the emitter layer and is oxidised in water vapour at 450 degrees C. The resulting AlAs-oxide serves as a current confining layer that constricts collector current flow to the intrinsic portion of the device. DC devices with typical current gains of 50 are observed.
引用
收藏
页码:399 / 401
页数:3
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