Development of high barrier films on flexible polymer substrates

被引:147
作者
Charton, C
Schiller, N
Fahland, M
Holländer, A
Wedel, A
Noller, K
机构
[1] Fraunhofer Inst Elektroenstrahl & Plasmatech, D-01277 Dresden, Germany
[2] Fraunhofer Inst Angew Polymerforsch, D-14476 Golm, Germany
[3] Fraunhofer Inst Verfahrenstech & Verpackung, D-85354 Freising Weihenstephan, Germany
关键词
ultrabarrier; sputtering; hybrid polymer; OLED;
D O I
10.1016/j.tsf.2005.07.253
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Barrier films deposited on flexible substrates are indispensable for a lot of applications. These are, for example, flexible displays based on LCD or OLED devices, flexible solar modules, materials for thermal insulation (e.g., vacuum insulated panels) or food packaging. The abovementioned applications already reveal very different requirements of barrier properties. Barrier films for food packaging for example can be produced with a single evaporated film, whereas the encapsulation of LCDs or OLED devices on flexible substrates is more sophisticated. In general, the approach of a complex multilayer system is used to fulfil the requirements for these ultrabarrier applications. In addition to their barrier properties, these multilayer systems also have to exhibit high transparency for many applications. In this case, a layer system can be used, that is based on sputtered Al2O3 layers, which are separated by different types of intermediate smoothing layers. This paper describes the concept and development of the Fraunhofer PolO alliance (www.polo.fhg.de) with regard to ultrabarriers for different applications. The barrier improvement of sputtered Al2O3 films deposited in a roll to roll process is analyzed. Further, the lacquering of inorganic organic hybrid polymers (Ormocers (R)) is described and synergetic effects from the use of the hybrid polymers in combination with sputtered Al2O3 films are discussed. Finally the assembly of an all flexible OLED test device is described, showing the suitability of complex multilayer systems for ultrabarrier applications. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:99 / 103
页数:5
相关论文
共 17 条
[1]   A new method for fabricating transparent barrier layers [J].
Affinito, JD ;
Gross, ME ;
Coronado, CA ;
Graff, GL ;
Greenwell, EN ;
Martin, PM .
THIN SOLID FILMS, 1996, 290 :63-67
[2]   Inorganic-organic polymers with barrier properties for water vapor, oxygen and flavors [J].
Amberg-Schwab, S ;
Hoffmann, M ;
Bader, H ;
Gessler, M .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1998, 13 (1-3) :141-146
[3]  
CHAHROUDI D, 1991, 34 ANN TECHN C P SOC, P130
[4]   Characterisation of aluminium oxynitride gas barrier films [J].
Erlat, AG ;
Henry, BM ;
Ingram, JJ ;
Mountain, DB ;
McGuigan, A ;
Howson, RP ;
Grovenor, CRM ;
Briggs, GAD ;
Tsukahara, Y .
THIN SOLID FILMS, 2001, 388 (1-2) :78-86
[5]  
Hanika M., 2003, P 46 ANN TECHN C SOC, P592
[6]  
Henry B. M., 2002, 45 ANN TECHN C P SOC, P514
[7]   A microstructural study of transparent metal oxide gas barrier films [J].
Henry, BM ;
Dinelli, F ;
Zhao, KY ;
Grovenor, CRM ;
Kolosov, OV ;
Briggs, GAD ;
Roberts, AP ;
Kumar, RS ;
Howson, RP .
THIN SOLID FILMS, 1999, 355 :500-505
[8]  
HOFFMANN G, 1993, 37 ANN TECHN C P SOC, P155
[9]  
LANGOWSKI HC, 1996, 39 ANN TECHN C P SOC, P398
[10]  
LANGOWSKI HC, 2002, 45 ANN TECHN C P SOC, P475