Silver-based reflective coatings for micromachined optical filters

被引：30

作者：

Bartek, M ^{[1
]}

Correia, JH ^{[1
]}

Wolffenbuttel, RF ^{[1
]}

机构：

[1] Delft Univ Technol, Fac Informat Technol & Syst, Lab Elect Instrumentat, DIMES, NL-2628 CD Delft, Netherlands

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1999年 / 9卷 / 02期

关键词：

D O I：

10.1088/0960-1317/9/2/314

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Application of a silicon nitride membrane under tension, placed within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, each with square aperture of up to 2 x 2 mm(2) and an electrostatically controlled spacing. form a tunable Fabry-Perot optical filter. Investigation of the silver-based reflective coatings. and mirror characterization, including influence of bulk micromachining, are presented.

引用

页码：162 / 165

页数：4

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