Theoretical study of the thermochemistry of molecules in the Si-B-H-Cl system

被引:24
作者
Ho, P [1 ]
Colvin, ME [1 ]
Melius, CF [1 ]
机构
[1] SANDIA NATL LABS, LIVERMORE, CA 94551 USA
关键词
D O I
10.1021/jp971947z
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A self-consistent set of thermochemical parameters for about 100 molecules in the Si-B-H-Cl system is obtained using a combination of ab initio electronic structure calculations and empirical corrections (the BAC-MP4 method). The species include stable and radical species as well as a few transition states. Trends in calculated heats of formation, bond dissociation enthalpies, and heats of reaction for various molecular decomposition channels are discussed, Silylboranes are most Likely to decompose via the elimination of I-H, HCl, or silylenes, The presence of the B atom reduces the energy required for the 1,1 elimination of H-2 from the Si atom, relative to the analogous reaction in disilane.
引用
收藏
页码:9470 / 9488
页数:19
相关论文
共 56 条
[1]   GROWTH-RATE ENHANCEMENT OF HEAVY N-TYPE AND P-TYPE DOPED SILICON DEPOSITED BY ATMOSPHERIC-PRESSURE CHEMICAL-VAPOR-DEPOSITION AT LOW-TEMPERATURES [J].
AGNELLO, PD ;
SEDGWICK, TO ;
COTTE, J .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (09) :2703-2709
[2]   Thermochemistry of molecules in the B-N-Cl-H system: Ab initio predictions using the BAC-MP4 method [J].
Allendorf, MD ;
Melius, CF .
JOURNAL OF PHYSICAL CHEMISTRY A, 1997, 101 (14) :2670-2680
[3]   THEORETICAL-STUDY OF THE THERMOCHEMISTRY OF MOLECULES IN THE SI-O-H SYSTEM [J].
ALLENDORF, MD ;
MELIUS, CF ;
HO, P ;
ZACHARIAH, MR .
JOURNAL OF PHYSICAL CHEMISTRY, 1995, 99 (41) :15285-15293
[4]   THEORETICAL-STUDY OF THE THERMOCHEMISTRY OF MOLECULES IN THE SI-C-H SYSTEM [J].
ALLENDORF, MD ;
MELIUS, CF .
JOURNAL OF PHYSICAL CHEMISTRY, 1992, 96 (01) :428-437
[5]   THEORETICAL-STUDY OF THE THERMOCHEMISTRY OF MOLECULES IN THE SI-C-CL-H SYSTEM [J].
ALLENDORF, MD ;
MELIUS, CF .
JOURNAL OF PHYSICAL CHEMISTRY, 1993, 97 (03) :720-728
[6]  
[Anonymous], 1993, CHEM VAPOR DEPOSITIO
[8]   PREDICTED ENTHALPIES OF FORMATION FOR METHYL-SUBSTITUTED SILAETHYLENES AND DISILENES [J].
BOATZ, JA ;
GORDON, MS .
JOURNAL OF PHYSICAL CHEMISTRY, 1991, 95 (19) :7244-7247
[9]   A THEORETICAL-STUDY OF DIFLUOROSILYLBORANE [J].
BOCK, CW ;
TRACHTMAN, M ;
MAINS, GJ .
JOURNAL OF PHYSICAL CHEMISTRY, 1986, 90 (01) :51-53
[10]   ABINITIO STUDY OF FLUORINATED SILYLBORANES .2. [J].
BOCK, CW ;
TRACHTMAN, M ;
MAINS, GJ .
JOURNAL OF PHYSICAL CHEMISTRY, 1988, 92 (02) :294-299