Relative yields, mass distributions and energy spectra of cluster ions sputtered from niobium under keV atomic and polyatomic gold ion bombardment

被引：41

作者：

Belykh, SF ^{[1
]}

Habets, B ^{[1
]}

Rasulev, UK ^{[1
]}

Samartsev, AV ^{[1
]}

Stroev, LV ^{[1
]}

Veryovkin, IV ^{[1
]}

机构：

[1] Arifov Inst Elect, Tashkent 700143, Uzbekistan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 164卷

关键词：

D O I：

10.1016/S0168-583X(99)01079-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In the present work, the comparative studies of relative yields, mass distributions and kinetic energy spectra of secondary Nb-n(+) ions (n = 1-16) sputtered from niobium target by atomic and polyatomic Au-m(-) projectiles (m = 1-3) with the energy E-0 = 6-18 keV/atom have been carried out. The strong effect of anomalously high non-additivity of metal sputtering as positive large cluster ions under polyatomic ion bombardment was found. The comparison and discussion of the results obtained for Nb and for Ta are presented. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：809 / 819

页数：11

共 48 条

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