Titanium oxide thin films for NH3 monitoring: Structural and physical characterizations

被引：65

作者：

Manno, D ^{[1
]}

Micocci, G ^{[1
]}

Rella, R ^{[1
]}

Serra, A ^{[1
]}

Taurino, A ^{[1
]}

Tepore, A ^{[1
]}

机构：

[1] CNR,IST IME,I-73100 LECCE,ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1997年 / 82卷 / 01期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.365848

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Titanium oxide thin films have been deposited by thermal evaporation in vacuum and then have been analyzed before and after a suitable thermal annealing in order to test their application in NH3 gas-sensing technology. In particular, spectrophotometric and conductivity measurements have been performed in order to determine the optical and electrical properties of titanium oxide thin films. The structure and the morphology of such material have been investigated by high resolution electron microscopy and small area electron diffraction. (C) 1997 American Institute of Physics.

引用

页码：54 / 59

页数：6

共 21 条

[1] OPTICAL-PROPERTIES OF RUTILE NEAR ITS FUNDAMENTAL-BAND GAP [J].