Formation and Characterization of NixInAs/InAs Nanowire Heterostructures by Solid Source Reaction

被引:57
作者
Chueh, Yu-Lun [1 ,2 ,3 ]
Ford, Alexandra C. [1 ,2 ,3 ]
Ho, Johnny C. [1 ,2 ,3 ]
Jacobson, Zachery A. [1 ,2 ,3 ]
Fan, Zhiyong [1 ,2 ,3 ]
Chen, Chih-Yen [4 ]
Chou, Li-Jen [4 ]
Javey, Ali [1 ,2 ,3 ]
机构
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA
[3] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
[4] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
关键词
D O I
10.1021/nl802681x
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The formation of crystalline NixInAs and NixInAs/InAs/NixInAs heterostructure nanowires by the solid source reaction of InAs nanowires with Ni is reported for the first time. The fundamental kinetics of the Ni/InAs alloying reaction is explored, with the Ni diffusion reported as the rate determining step. The diffusivity of Ni is independent of the nanowire diameter, with an extracted diffusion activation energy of similar to 1 eV/atom. The metallic NixInAs exhibits a modest resistivity of similar to 167 mu Omega.cm for diameters >30 nm, with the resistivity increasing as the nanowire diameter is further reduced due to the enhanced surface scattering. The alloying reaction readily enables the fabrication of NixInAs/InAs/NixInAs heterostructure nanowire transistors for which the length of the InAs segment (i.e., channel length) is controllably reduced through subsequent thermal annealing steps, therefore enabling a systematic study of electrical properties as a function of channel length. From the electrical transport studies, an electron mean free path on the order of a few hundred nm is observed for InAs NWs with a unit length normalized, ON-state resistance of similar to 7.5 k Omega/mu m. This approach presents a route toward the fabrication for high performance InAs nanowire transistors with ohmic nanoscale contacts and low parasitic capacitances and resistances.
引用
收藏
页码:4528 / 4533
页数:6
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