VUV ablation of polymers by emission from gas-puff Z-pinch plasmas

被引：5

作者：

Deno, H ^{[1
]}

Sugiyama, S ^{[1
]}

Kakudate, Y ^{[1
]}

Yoshida, M ^{[1
]}

Fujiwara, S ^{[1
]}

机构：

[1] NATL INST MAT & CHEM RES,TSUKUBA,IBARAKGI,JAPAN

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷

关键词：

D O I：

10.1016/0169-4332(95)00531-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We have made experiments of the polymer ablation utilizing the gas-puff Z-pinch plasmas which provide a highly bright emission extending over a broad wavelength range from visible lights to X-rays. When the emission was irradiated through a mask onto a polytetrafluoroethylene (PTFE) film, the irradiated area was ablated and a pattern of the mask was copied on the surface of the film. A detail observation with an atomic force microscope showed that the irradiated area was precisely processed with no thermal damage. A chlorinated polyvinylchloride (Cl-PVC) pellet was also irradiated. The analysis of unirradiated and irradiated surface was performed by FTIR-ATR. The FTIR-ATR spectrum after irradiation shows an appearance of a new peak attributed to C5C bonds.

引用

页码：563 / 568

页数：6