Novel architecture for silicon-based integrated interferometer with phase modulation by elasto-optic effect

被引：1

作者：

Gorecki, C

Chollet, F

Kawakatsu, H

机构：

来源：

MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS II | 1997年 / 3008卷

关键词：

integrated optics; microinterferometry; surface-acoustic waves; Si-based machining;

D O I：

10.1117/12.271410

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

As a novelty application of Si-based integrated optics, the preliminary results of realisation of a compact Mach-Zehnder interferometer will be presented. The deposition of a piezoelectric ZnO thin-film transducer on the reference arm of the interferometer will allow to transform this optically passive device in a device under an active phase modulation, useful to built a high-resolution microsensing systems with optical heterodyning.

引用

页码：152 / 159

页数：8