The soft X-ray scanning photoemission microscopy project at SRRC

被引：20

作者：

Ko, CH

Klauser, R

Wei, DH

Chan, HH

Chuang, TJ

机构：

[1] Synchrotron Radiat Res Ctr, Hsinchu 30077, Taiwan

[2] Acad Sinica, Inst Atom & Mol Sci, Taipei 10764, Taiwan

来源：

JOURNAL OF SYNCHROTRON RADIATION | 1998年 / 5卷

关键词：

zone plates; scanning microscopy; X-ray photoelectron spectroscopy;

D O I：

10.1107/S0909049597018955

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The Synchrotron Radiation Research Center (SRRC) and the Institute of Atomic and Molecular Sciences (IAMS) have initiated a project to construct a scanning photoelectron spectromicroscopy end station at SRRC (SRRC-SPEM). High-brightness soft X-rays will be provided by the U5 undulator beamline. Zone-plate-based soft X-ray optics will be used to focus the beam to form the microprobe. A hemispherical sector analyser with multichannel detection capability will collect the photoelectrons. A total of up to 32 images can be acquired concurrently. The apparatus is also equipped with a sample distribution system for in sial sample preparation and characterization in conjunction with other surface spectroscopic techniques.

引用

页码：299 / 304

页数：6

共 10 条

[1]

ADE H, 1997, J ELECT SPECTROSC RE, V84

[2]

KLAUSER R, 1997, JSPE P 2 US JAP WORK, P93

[3]

KLAUSER R, 1996, P OJI SEM MAS RANZ S, P174

[4]

Ko CH, 1995, P SOC PHOTO-OPT INS, V2516, P150, DOI 10.1117/12.221668

[5]

KO CH, 1995, THESIS STATE U NEW Y

[6]

KO CH, 1997, IN PRESS P INT C XRA

[7] BUILDING A THIRD GENERATION SOURCE (INVITED) [J].

LIU, YC .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (02) :2011-2016

[8]

Michette A.G., 1986, OPTICAL SYSTEMS SOFT

[9] ULTRAHIGH LATERAL RESOLUTION SPECTROMICROSCOPY BEAM LINE AT ELETTRA (TRIESTE) [J].

NATALETTI, P ;

CONTARINI, S ;

GARIAZZO, C ;

MINNAJA, N ;

MUSICANTI, M ;

JARK, W ;

KISKINOVA, M ;

MELPIGNANO, P ;

MORRIS, D ;

ROSEI, R .

SURFACE AND INTERFACE ANALYSIS, 1992, 18 (09) :655-660

[10]

TSENG PC, 1995, SRRCRBMIM9415

← 1 →