Modification of ceramic coatings by swift heavy ions

被引：8

作者：

Bolse, W ^{[1
]}

Bolse, T ^{[1
]}

Dais, C ^{[1
]}

Etissa-Debissa, D ^{[1
]}

Elsanousi, A ^{[1
]}

Feyh, A ^{[1
]}

Kalafat, M ^{[1
]}

Paulus, H ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Strahlemphys, D-7000 Stuttgart, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 2005年 / 200卷 / 5-6期

关键词：

ion beam modification; ceramics; swift heavy ions; nano-structuring; dewetting; self-assembly;

D O I：

10.1016/j.surfcoat.2005.08.066

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Throughout the last decade, swift heavy ions (SHI) of some MeV/amu kinetic energy have revealed to be an excellent tool for the "nano-modification" of materials. Besides the already existing ion-track technology, which makes use of the structural and property alterations of the material inside the tracks of spatially isolated single-ion impacts, we have recently found that thin oxide films can be restructured on a sub-pm scale by triggering structural instabilities and subsequent self-assembly processes with high fluence SHI irradiation. This way, sometimes, quite regular arrays of nano-structures at the surface and at the interface of the layer system can be achieved, which cover a large area. In the present paper, we will briefly summarize our results on self-organization effects in thin oxide-films on Si and SiO2, driven by capillary forces (dewetting phenomena), by ion-beam induced tensile stresses (lamellae and "nano-tower" formation) and by the pressure pulse due to the density change upon transient melting of the material inside the ion-track (ripple formation at the interface). (c) 2005 Elsevier B.V All rights reserved.

引用

页码：1430 / 1435

页数：6

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