Enhancement of nitrogen gas breakdown voltage between coated aluminum electrodes with fluorocarbon polymer film prepared in C8F18 vapor RF plasma

被引：6

作者：

Biloiu, C

Biloiu, IA

Sakai, Y

Suda, Y

Nakajima, M

机构：

[1] Hokkaido Univ, Dept Ingn Elect & Informat, Sapporo, Hokkaido 0608628, Japan

[2] Fuji Elect Corp R&D Ltd, Ichihara 2908511, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2003年 / 42卷 / 2B期

关键词：

breakdown voltage; fluorocarbon-polymer-film-coated electrode; Paschen curve; perfluorocarbon vapor;

D O I：

10.1143/JJAP.42.L201

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The breakdown voltage (V-s) of nitrogen gas between aluminum (Al) sphere-sphere electrodes, which were coated with thin fluorocarbon polymer (FCP) films in a C8F18 vapor RF plasma, at a gas pressure (p) times gap length (d) between 0.6 Torr(.)cm and 20 Torr (.) cm was studied. The V-S in this electrode system was enhanced threefold at pd = 1 Torr(.)cm and twofold at 20 Torr(.)cm compared with V-s between the Al electrodes. The V-s enhancement mechanism was examined with respect to film insulation properties and secondary-electron emission from FCP film.

引用

页码：L201 / L203

页数：3

共 20 条

[1]

BILOIU C, 2001, P 25 ICPIG INT C PHY, V2, P129

[2]

BLAIR DTA, 1978, ELECT BREAKDOWN GASE, P581

[3] Electric field reduction due to charge accumulation in a dielectric-covered electrode system [J].