Simulation of Ta2O5-gate ISFET temperature characteristics

被引:35
作者
Chou, JC [1 ]
Li, YS
Chiang, JL
机构
[1] Natl Yunlin Univ Sci & Technol, Dept Elect Engn, Touliu 640, Yunlin, Taiwan
[2] Natl Sun Yat Sen Univ, Dept Elect Engn, Kaohsiung 804, Taiwan
关键词
pK(a); pK(b); Ta2O5; ISFET; temperature coefficient;
D O I
10.1016/S0925-4005(00)00611-0
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The simulated response of an ion-sensitive field-effect transistor (ISFET) with a tantalum pentoxide-gate (Ta2O5-gate) insulator is introduced in this paper. This simulation is based on the site-binding model and is designed for an ISFET working in a constant charge mode. Here, the temperature characteristics of Ta2O5-gate ISFET were theoretically studied. First, the Stern Electrical Double Layer Model was used to induce the pK(a) and pK(b) of Ta2O5 values. Secondly, the temperature coefficient was calculated to draw the related curve of the different temperature parameters using the pK(a) and pK(b) values and the ISFET behaviors. ISFETs were predicted under different temperatures. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:73 / 76
页数:4
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