Design and performance of 256 x 256 bolometer-type uncooled infrared detector

被引：29

作者：

Wada, H ^{[1
]}

Nagashima, M ^{[1
]}

Oda, N ^{[1
]}

Sasaki, T ^{[1
]}

Kawahara, A ^{[1
]}

Kanzaki, M ^{[1
]}

Tsuruta, Y ^{[1
]}

Mori, T ^{[1
]}

Matsumoto, S ^{[1
]}

Shima, T ^{[1
]}

Hijikawa, M ^{[1
]}

Tsukamoto, N ^{[1
]}

Gotoh, H ^{[1
]}

机构：

[1] Japan Def Agcy, Tech Res & Dev Inst, Setagaya Ku, Tokyo 154, Japan

来源：

INFRARED DETECTORS AND FOCAL PLANE ARRAYS V | 1998年 / 3379卷

关键词：

uncooled; infrared; bolometer; thermal image;

D O I：

10.1117/12.317635

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

This paper discusses the design and performance of a 256 x 256 bolometer-type uncooled infrared detector. First, model calculations are carried out to clarify the relations of the noise equivalent temperature difference (NETD) to the electrical properties of the bolometer material. The properties are mainly resistivity,the temperature coefficient of resistance (TCR) and 1/f noise. To obtain real-time images with NETD values smaller than 0.15 K for F/1 optics, vanadium oxide thin film was developed as the bolometer material, having a sheet resistance range of 5-50 k Omega/square and a TCR value of -2%/K. This material did not exhibit thermochromism like VO2(A), because it was identified as VO2(B). The bolometer-array was statistically evaluated and put into the infrared camera. Finally, a thermal image with an NETD of 0.15 K was obtained.

引用

页码：90 / 100

页数：11