Optical absorption of amorphous hydrogenated carbon thin films

被引:11
作者
Helmbold, A [1 ]
Meissner, D [1 ]
机构
[1] INST SOLAR ENERGY RES GMBH, DEPT PHOTOELECTROCHEM & NEW MAT, D-30165 HANNOVER, GERMANY
关键词
amorphous materials; carbon; conductivity; optical properties;
D O I
10.1016/0040-6090(95)08251-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Amorphous hydrogenated carbon layers were deposited from ethylene in a capacitively coupled r.f.-discharge reactor under different self-bias voltages and by addition of different amounts of phosphine as an assumed ''doping'' gas. The optical constants of the thin films were determined by analysing reflection, transmission and photothermal deflection measurements. Accordingly, the absorption behaviour below an absorption coefficient alpha of 10(4) cm(-1) can be fitted very well by a simple power law. Extrapolating the absorption to lower excitation energies suggests an increase of the density of states at the Fermi level accompanying the increase of the electrical conductivity with increasing self-bias voltage or phosphine concentration. No hint of any ''doping'' effect is found.
引用
收藏
页码:196 / 203
页数:8
相关论文
共 36 条
[1]   INTERBAND ABSORPTION-SPECTRA OF DISORDERED SEMICONDUCTORS IN THE COHERENT POTENTIAL APPROXIMATION [J].
ABE, S ;
TOYOZAWA, Y .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1981, 50 (07) :2185-2194
[2]   AUTOMATIC-DETERMINATION OF THE OPTICAL-CONSTANTS OF INHOMOGENEOUS THIN-FILMS [J].
BORGOGNO, JP ;
LAZARIDES, B ;
PELLETIER, E .
APPLIED OPTICS, 1982, 21 (22) :4020-4029
[3]  
CONNELL GAN, 1985, TOPICS APPL PHYSICS, V36
[4]   PI-BANDS AND GAP STATES FROM OPTICAL-ABSORPTION AND ELECTRON-SPIN-RESONANCE STUDIES ON AMORPHOUS-CARBON AND AMORPHOUS HYDROGENATED CARBON-FILMS [J].
DASGUPTA, D ;
DEMICHELIS, F ;
PIRRI, CF ;
TAGLIAFERRO, A .
PHYSICAL REVIEW B, 1991, 43 (03) :2131-2135
[5]   OPTICAL-ABSORPTION EDGE AND DISORDER EFFECTS IN HYDROGENATED AMORPHOUS DIAMONDLIKE CARBON-FILMS [J].
DATTA, T ;
WOOLLAM, JA ;
NOTOHAMIPRODJO, W .
PHYSICAL REVIEW B, 1989, 40 (09) :5956-5960
[6]  
Davis E. A., 1979, ELECT PROCESSES NONC
[7]   NEW APPROACH TO OPTICAL ANALYSIS OF ABSORBING THIN SOLID FILMS [J].
DEMICHELIS, F ;
KANIADAKIS, G ;
TAGLIAFERRO, A ;
TRESSO, E .
APPLIED OPTICS, 1987, 26 (09) :1737-1740
[8]   EVALUATION OF THE [C(SP3)]/[C(SP2)] RATIO IN DIAMOND-LIKE FILMS THROUGH THE USE OF A COMPLEX DIELECTRIC-CONSTANT [J].
DEMICHELIS, F ;
PIRRI, CF ;
TAGLIAFERRO, A .
PHYSICAL REVIEW B, 1992, 45 (24) :14364-14370
[9]   HARD CARBON COATINGS WITH LOW OPTICAL-ABSORPTION [J].
DISCHLER, B ;
BUBENZER, A ;
KOIDL, P .
APPLIED PHYSICS LETTERS, 1983, 42 (08) :636-638
[10]   ON THE DETERMINATION OF THE OPTICAL-CONSTANTS N(LAMBDA) AND ALPHA(LAMBDA) OF THIN SUPPORTED FILMS [J].
ELIZALDE, E ;
RUEDA, F .
THIN SOLID FILMS, 1984, 122 (01) :45-57