Nanomechanical properties of CNx overcoats and Cathodic Arc Carbon(CAC) films

被引：10

作者：

Hsiao, RC

Bogy, DB

Bhatia, CS

机构：

[1] Univ Calif Berkeley, Comp Mech Lab, Berkeley, CA 94720 USA

[2] IBM Corp, Storage Syst Div, San Jose, CA 95193 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1998年 / 34卷 / 04期

关键词：

nanotribology; thin films; nanoindentation; scanning probe microscope (SPM); carbon overcoat;

D O I：

10.1109/20.706683

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The nano-wear behavior of nitrogenated carbon films that were deposited on disks at various bias was studied. It was found that the deposition bias played an important role in determining nanomechanical properties of CNx films. Nanoindentation and wear tests were also performed on a Cathodic Are Carbon (CAC) film for which the mechanical properties vary along the thickness direction.

引用

页码：1720 / 1722

页数：3

共 10 条

[1]

HSIAO R, 1997, 97003 CML

[2]

HSIAO R, 1996, 96020 CML

[3]

JIANG Z, 1995, 95024 CML

[4]

JIANG Z, 1995, UNPUB ASME J TRIBOLO