An easy-to-use non-optical shear-force distance control for near-field optical microscopes

被引:72
作者
Barenz, J
Hollricher, O
Marti, O
机构
[1] Department of Experimental Physics, University of Ulm
[2] Omicron Vakuumphysik, Taunusstein
关键词
D O I
10.1063/1.1146995
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We present an easy-to-use non-optical shear-force detection system for tip-sample distance control in scanning near-field optical microscopes. The fibre tip is fixed in a four-segmented piezo-tube by a polymer, Polyisobutylene, which couples the tip stiffly to the piezo at frequencies of 10 kHz or more at room temperature. One segment of the piezo-tube excites the fibre tip in resonance, while the other three segments detect the tip vibration in the manner of a piezo-microphone. When the tip is damped by shear forces the induced voltage at the three segments changes and can easily be detected with a lock-in amplifier. Further our method allows a fast and reproducible tip exchange with minor adjustments of mechanical ol electrical components. We demonstrate the performance of our distance control on a holographically fabricated line pattern with 417 nm lattice spacing and 10 nm height. A height resolution of better than 1 nm is demonstrated. (C) 1996 American Institute of Physics.
引用
收藏
页码:1912 / 1916
页数:5
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