Comparative study of defect energetics in HfO2 and SiO2

We perform ab initio calculations, based on density functional theory, for substitutional and vacancy defects in the monoclinic hafnium oxide (m-HfO2) and alpha-quartz (SiO2). The neutral oxygen vacancies and substitutional Si and Hf defects in HfO2 and SiO2, respectively, are investigated. Our calculations show that, for a large range of Hf chemical potential, Si substitutional defects are most likely to form in HfO2, leading to the formation of a silicate layer at the HfO2/Si interface. We also find that it is energetically more favorable to form oxygen vacancies in SiO2 than in HfO2, which implies that oxygen-deficient HfO2 grown on top of SiO2 will consume oxygen from the SiO2. (C) 2004 American Institute of Physics.