Status of nitride based light emitting and laser diodes on SiC

被引:13
作者
Doverspike, K [1 ]
Bulman, GE [1 ]
Sheppard, ST [1 ]
Kong, HS [1 ]
Leonard, M [1 ]
Dieringer, H [1 ]
Weeks, TW [1 ]
Edmond, J [1 ]
Brown, JD [1 ]
Swindle, JT [1 ]
Schetzina, JF [1 ]
Song, YK [1 ]
Kuball, M [1 ]
Nurmikko, A [1 ]
机构
[1] Cree Res Inc, Durham, NC 27713 USA
来源
NITRIDE SEMICONDUCTORS | 1998年 / 482卷
关键词
D O I
10.1557/PROC-482-1169
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Single crystal thin films with compositions from the AlN-InN-GaN system were grown via metal-organic chemical vapor deposition (MOCVD) on single crystal 6H-SiC substrates. Blue light emitting (LED) and laser diode (LD) structures were fabricated. The conducting buffer layer LEDs employed an AlGaN buffer layer which provides a conduction path between SiC and the active device region. The external quantum efficiency of the LEDs was 3% at 20 mA- 3.6V and peak emission wavelength of 430 nm. Violet and blue LDs were fabricated and consisted of an 8-well InGaN/GaN multiple quantum well (MQW) active region in a separate confinement heterostructure (SCH) design. Lasing was obtained both on structures using an insulating buffer layer, and also on structures using a conducting buffer layer. The resulting lasers operated at room temperature using pulsed and continuous wave operation with an emission wavelength of 404-435 nm. The lowest threshold current density obtained for lasing was 11 kA/cm(2).
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页码:1169 / 1178
页数:10
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