Texture control of fluorine-doped tin oxide thin film

被引:55
作者
Kim, Chang-Yeoul [1 ]
Riu, Doh-Hyung [2 ]
机构
[1] Korea Inst Ceram Eng & Tech, NanoIT Convergence Ctr, Seoul 153801, South Korea
[2] Seoul Natl Univ Technol, Dept New Mat Engn, Seoul, South Korea
关键词
Texture; Crystal orientation; X-ray diffraction; Scanning electron microscopy; Transparent conducting oxide; Tin oxide; SPRAY-PYROLYSIS; OPTICAL-PROPERTIES; SUBSTRATE-TEMPERATURE; ELECTRICAL-PROPERTIES; PYROSOL PROCESS; SNO2; FILMS; TRANSPARENT; DEPOSITION;
D O I
10.1016/j.tsf.2010.12.096
中图分类号
T [工业技术];
学科分类号
120111 [工业工程];
摘要
The texture control of transparent oxide thin film, the crystalline orientation, is very important, because it is related to the electrical resistivity and the optical transparency. It is known that the crystal orientation could be controlled by varying precursor source, gas flow rate, and deposition temperature. We deposited fluorine-doped tin oxide (FTO) thin film on aluminoborosilicate glass by spraying water-based solution and ethyl alcohol-added solution. We showed in this research that (200) and (301) preferential orientation of FTO thin film can be controlled by the addition of ethyl alcohol to FTO coating solution. (200) oriented FTO thin film deposited from ethyl alcohol-added solution comprises of pyramidal crystallites with {111} polar faces, which contain {101} contact twin planes. {101} contact twin planes forms salient reentrant angle which provides nucleating sites and makes crystallites grow abnormally. (301) orientation is thought through Periodic Bond Chains of tin hydroxide which forms prismatic long crystallites. Prismatic crystallites are comprised of {110} crystal faces which contain {101} repeated contact twin. It is very helpful to control (200) or (301) oriented crystal formation in transparent conducting oxide film, because the texture affects the electrical and optical properties of transparent conducting oxide film. We suggest that ethyl alcohol addition plays a role to form crystallites with {111} polar faces corresponding to (200) preferential orientation. The crystal morphologies are changed by doping elements, precursor sources, deposition conditions like flow rate and temperatures, and solvents. (C) 2010 Published by Elsevier B.V.
引用
收藏
页码:3081 / 3085
页数:5
相关论文
共 19 条
[1]
Barrett C. S., 1980, STRUCTURE METALS, P204
[2]
A study on low cost-high conducting fluorine and antimony-doped tin oxide thin films [J].
Elangovan, E ;
Ramamurthi, K .
APPLIED SURFACE SCIENCE, 2005, 249 (1-4) :183-196
[3]
PREPARATION AND CHARACTERIZATION OF SNO2 THIN-FILMS DEPOSITED BY SPRAY-PYROLYSIS FROM SNCL2 AND SNCL4 PRECURSORS [J].
GORDILLO, G ;
MORENO, LC ;
DELACRUZ, W ;
TETERAN, P .
THIN SOLID FILMS, 1994, 252 (01) :61-66
[4]
Criteria for choosing transparent conductors [J].
Gordon, RG .
MRS BULLETIN, 2000, 25 (08) :52-57
[5]
HARTMAN P, 1973, CRYSTAL GROWTH INTRO, pCH14
[6]
Preferred orientations in polycrystalline SnO2 films grown by atmospheric pressure chemical vapor deposition [J].
Korotkov, RY ;
Ricou, P ;
Farran, AJE .
THIN SOLID FILMS, 2006, 502 (1-2) :79-87
[7]
Structural, electrical and optical characteristics of SnO2:Sb thin films by ultrasonic spray pyrolysis [J].
Lee, Seung-Yup ;
Park, Byung-Ok .
THIN SOLID FILMS, 2006, 510 (1-2) :154-158
[8]
Effect of the fluorine content on the structural and electrical properties of SnO2 and ZnO-SnO2 thin films prepared by spray pyrolysis [J].
Martinez, AI ;
Acosta, DR .
THIN SOLID FILMS, 2005, 483 (1-2) :107-113
[9]
ANALYSIS OF THE EFFECTS OF SUBSTRATE-TEMPERATURE, CONCENTRATION OF TIN CHLORIDE AND NATURE OF DOPANTS ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF SPRAYED SNO2 FILMS [J].
MESSAD, A ;
BRUNEAUX, J ;
CACHET, H ;
FROMENT, M .
JOURNAL OF MATERIALS SCIENCE, 1994, 29 (19) :5095-5103
[10]
Effect of solvent ratio on the properties of highly oriented sprayed fluorine-doped tin oxide thin films [J].
Moholkar, A. V. ;
Pawar, S. M. ;
Rajpure, K. Y. ;
Bhosale, C. H. .
MATERIALS LETTERS, 2007, 61 (14-15) :3030-3036