Design and fabrication of a nanostructured surface combining antireflective and enhanced-hydrophobic effects

被引:47
作者
Chang, Y. C. [1 ]
Mei, G. H.
Chang, T. W.
Wang, T. J.
Lin, D. Z.
Lee, C. K.
机构
[1] Natl Taiwan Univ, Inst Appl Mech, Taipei 106, Taiwan
[2] Mat & Chem Res Labs, Ind Technol Res Inst, Hsinchu 310, Taiwan
[3] Natl Taiwan Univ, Dept Engn Sci & Ocean Engn, Taipei 106, Taiwan
关键词
D O I
10.1088/0957-4484/18/28/285303
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Herein, we propose a special type of periodic subwavelength structure, which is optically an effective gradient-index (GRIN) antireflective surface that also exhibits enhanced-hydrophobic behaviour. Our new concept was developed adopting both the effective medium theory (EMT) and Wenzel's wettability model. To demonstrate the concept, an inverted pyramid structure was fabricated by electron beam (EB) lithography and anisotropic etching. The experimental data was found to be in good agreement with the theoretical prediction. Some potential applications that can benefit from this combination of antireflection and enhanced-hydrophobicity features are discussed.
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页数:6
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