Effect of metal-ion doping on the optical properties of nanocrystalline ZnO thin films -: art. no. 014306

被引:64
作者
Mendoza-Galván, A
Trejo-Cruz, C
Lee, J
Bhattacharyya, D
Metson, J
Evans, PJ
Pal, U
机构
[1] Univ Autonoma Puebla, Inst Fis, Puebla 72570, Mexico
[2] CINVESTAV, IPN, Unidad Queretaro, Queretaro 76001, Queretaro, Mexico
[3] Univ Auckland, Dept Mech Engn, Auckland 1, New Zealand
[4] Univ Auckland, Dept Chem, Auckland 1, New Zealand
[5] Australian Nucl Sci & Technol Org, Menai, NSW 2234, Australia
关键词
D O I
10.1063/1.2158503
中图分类号
O59 [应用物理学];
学科分类号
摘要
Optical properties of metal (Al, Ag, Sb, and Sn)-ion-implanted ZnO films have been studied by ultraviolet-visible spectroscopy and spectroscopic ellipsometric techniques. The effects of metal-ion doping on the optical band gap (E-g), refractive index (n), and extinction coefficient (k) of nanocrystalline ZnO films have been studied for the similar implantation dose of all the metal ions. The ellipsometric spectra of the ion-implanted samples could be well described by considering an air/roughness/ZnO-M (layer 1)/ZnO (layer 2)/glass model. The band gap of ZnO films increases with Al ion doping and decreases with doping of Ag, Sb, and Sn ions. The refractive index of ZnO films in the visible spectral region increases substantially on Sb and Sn ion doping, while it decreases to some extent with Al ion doping.
引用
收藏
页数:6
相关论文
共 27 条
[11]   Zinc oxide films formed by oxidation of zinc under low partial pressure of oxygen [J].
Gao, W ;
Li, ZW ;
Harikisun, R ;
Chang, SS .
MATERIALS LETTERS, 2003, 57 (08) :1435-1440
[12]   DATA-ANALYSIS FOR SPECTROSCOPIC ELLIPSOMETRY [J].
JELLISON, GE .
THIN SOLID FILMS, 1993, 234 (1-2) :416-422
[13]   Structural and optical properties of silver-doped zinc oxide sputtered films [J].
Jeong, SH ;
Park, BN ;
Lee, SB ;
Boo, JH .
SURFACE & COATINGS TECHNOLOGY, 2005, 193 (1-3) :340-344
[14]   Deposition of aluminum-doped zinc oxide films by RF magnetron sputtering and study of their structural, electrical and optical properties [J].
Jeong, SH ;
Lee, JW ;
Lee, SB ;
Boo, JH .
THIN SOLID FILMS, 2003, 435 (1-2) :78-82
[15]  
Kolb D. M., 1981, CURRENT TOPICS MAT S, V7, P226
[16]   Deposition of ZnO thin films by magnetron sputtering for a film bulk acoustic resonator [J].
Lee, JB ;
Kim, HJ ;
Kim, SG ;
Hwang, CS ;
Hong, SH ;
Shin, YH ;
Lee, NH .
THIN SOLID FILMS, 2003, 435 (1-2) :179-185
[17]   Recent advances in ZnO materials and devices [J].
Look, DC .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 80 (1-3) :383-387
[18]  
Metson JB, 1999, SURF INTERFACE ANAL, V28, P159, DOI 10.1002/(SICI)1096-9918(199908)28:1<159::AID-SIA597>3.0.CO
[19]  
2-4
[20]   Growth of p-type zinc oxide films by chemical vapor deposition [J].
Minegishi, K ;
Koiwai, Y ;
Kikuchi, Y ;
Yano, K ;
Kasuga, M ;
Shimizu, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1997, 36 (11A) :L1453-L1455