Synthesis of oxide nanoparticles embedded in polyimide

被引：40

作者：

Chung, Y ^{[1
]}

Park, HP ^{[1
]}

Jeon, HJ ^{[1
]}

Yoon, CS ^{[1
]}

Lim, SK ^{[1
]}

Kim, YH ^{[1
]}

机构：

[1] Hanyang Univ, Dept Mat Sci & Engn, Seoul 133791, South Korea

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 06期

关键词：

D O I：

10.1116/1.1624269

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：L9 / L11

页数：3

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