XPS and Auger study of the radial variations of diamond thin films grown by the oxy-acetylene flame method

被引：6

作者：

Garcia, I ^{[1
]}

Gutierrez, A ^{[1
]}

Vazquez, A ^{[1
]}

机构：

[1] CSIC, CENIM, DEPT CORROS & PROTECT, E-28040 MADRID, SPAIN

来源：

SURFACE & COATINGS TECHNOLOGY | 1997年 / 88卷 / 1-3期

关键词：

X-ray photoelectron spectroscopy; Auger electron spectroscopy; diamond thin films;

D O I：

10.1016/S0257-8972(96)02867-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Free standing diamond thin films grown by the oxy-acetylene flame method have been investigated by X-ray photoelectron spectroscopy (XPS) and Anger electron spectroscopy (AES). The radial distribution of the sp(2)-hybridized carbon species on the films and, consequently, the film quality, have been determined. WhiIe XPS does not seem to be an appropriate technique to distinguish between very small variations in film quality, an analysis of the Auger widths can explain the differences observed by scanning electron microscopy (SEM) and optical microscopy in the different regions of the samples.

引用

页码：172 / 177

页数：6

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