Preparation and properties of RF sputtered indium-tin oxide thin films for applications as heat mirrors in photothermal solar energy conversion

被引：22

作者：

Boiadjiev, Stefan I. ^{[1
]}

Dobrikov, Georgi H. ^{[1
]}

Rassovska, Milka M. M. ^{[1
]}

机构：

[1] Tech Univ Sofia, Sofia 1756, Bulgaria

来源：

THIN SOLID FILMS | 2007年 / 515卷 / 24期

关键词：

heat mirrors; ITO; reactive sputtering; thin films;

D O I：

10.1016/j.tsf.2007.03.175

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

in the present research, in order to deposit indium-tin oxide (ITO) thin films the method of RF reactive sputtering was used. Sputtering of two types indium-tin targets in the presence of oxygen as reactive gas was made. The technological parameters were optimized to obtain films with good quality on different substrates. The films' microstructure was studied by TEM and SAED. To identify the optical properties of the films the methods of infrared spectrometry and laser ellipsometry were used. UV-VIS spectrophotometry showed the high visible transmittance of the RF sputtered ITO films. Heating of the substrates during the films sputtering and their post deposition thermal treatment also were studied. The ultimate goal of the present research activities was to develop new technological processes leading to low-cost, highly effective optical coatings for application in photo thermal solar energy conversion and utilization. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：8465 / 8468

页数：4

共 10 条

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