The ion beam materials analysis laboratory at the environmental molecular sciences laboratory

被引：60

作者：

Thevuthasan, S ^{[1
]}

Peden, CHF ^{[1
]}

Engelhard, MH ^{[1
]}

Baer, DR ^{[1
]}

Herman, GS ^{[1
]}

Jiang, W ^{[1
]}

Liang, Y ^{[1
]}

Weber, WJ ^{[1
]}

机构：

[1] Pacific NW Lab, Environm Mol Sci Lab, Richland, WA 99352 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1999年 / 420卷 / 1-2期

关键词：

ion beam materials; environmental molecular sciences laboratory (EMSL); Rutherford backscattering spectrometry (RBS);

D O I：

10.1016/S0168-9002(98)00908-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The Environmental Molecular Sciences Laboratory (EMSL), a Department of Energy (DOE) collaborative scientific user facility located at Pacific Northwest National Laboratory (PNNL), is completing an accelerator facility dedicated to ion beam modification and analysis of materials. This facility consists of a new 3.4 MV tandem accelerator from National Electrostatic Corporation (NEC), two ion sources including an Alphatross source and a SNICS sputter source, and three beam lines. One of the beam lines ( + 30 degrees beam line) is dedicated to ultrahigh vacuum (UHV) materials analysis. The end station at this beam line has high-energy ion scattering capabilities including Rutherford backscattering spectrometry (RBS), channeling, nuclear reaction analysis (NRA), and elastic recoil detection analysis (ERDA), as well as electron spectroscopies such as low-energy electron diffraction (LEED) and Auger electron spectroscopy (AES). This end station is interfaced with the EMSL sample transfer capability which allows a sample to be synthesized, processed, and characterized in different surface science instruments at EMSL without exposing the sample to air. A commercial high vacuum RC43 end station from NEC has capabilities for RES, NRA, ERDA, particle induced X-ray and gamma emission (PIXE and PIGE), and is located at the end of the -15 degrees beam line. A custom high vacuum end station is connected to the +15 degrees beam line and is dedicated to ion implantation. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：81 / 89

页数：9

共 13 条

[1]

Chu W., 1978, BACKSCATTERING SPECT, DOI DOI 10.1016/B978-0-12-173850-1.50008-9

[2]

Feldman L.C., 1982, MAT ANAL ION CHANNEL

[3]

Feldman L. C., 1986, Fundamentals of Surface and Thin Film Analysis

[4]

GIEDD RE, 1996, P 14 INT C APPL 1 2, P993

[5]

HATORI S, 1996, P 14 INT C APPL 1 2, P1099

[6] 3 MV PELLETRON ACCELERATOR AT IPAS [J].

LIN, EK ;

WANG, CW ;

TENG, PK ;

FOU, CM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 56-7 :996-999

[7] THE DEDICATED ACCELERATOR-BASED IBA FACILITY AGLAE AT THE LOUVRE [J].

MENU, M ;

CALLIGARO, T ;

SALOMON, J ;

AMSEL, G ;

MOULIN, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 45 (1-4) :610-614

[8] A 3-MV PELLETRON FOR MATERIALS RESEARCH AT HEIDELBERG [J].

OBERSCHACHTSIEK, P ;

WEISER, M ;

KALBITZER, S .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 56-7 :1010-1013

[9]

OLIVER A, 1996, P 14 INT C APPL 1 2, P1105

[10]

POLMAN A, 1994, MATER RES SOC SYMP P, V316, P385

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