Tribological properties of a-C:H multilayer structures

被引：24

作者：

Knoblauch-Meyer, L ^{[1
]}

Hauert, R ^{[1
]}

机构：

[1] EMPA, Swiss Fed Labs Mat Testing & Res, CH-8600 Dubendorf, Switzerland

来源：

THIN SOLID FILMS | 1999年 / 338卷 / 1-2期

关键词：

multilayers; a-C : H; tribology; plasma processing and deposition;

D O I：

10.1016/S0040-6090(98)01150-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanoscaled multilayer coatings consisting of alternating layers of different types of amorphous hydrogenated carbon (a-C:H) films were deposited in a plasma activated chemical vapor deposition (PACVD) process. The thickness of the multilayer repeat unit as well as the interface width between these layers were varied by controlling the substrate bias voltage. The influence of the achieved multilayer structure on the tribological properties was investigated. At a certain range of thickness of the multilayer repeat unit, a decrease in wear rate by a factor of ten down to 4 x 10(-18) m(3)/Nm was observed. Another trend observed was the correlation between an abrupt interface and lower wear. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：172 / 176

页数：5

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