Synthesis of large arrays of well-aligned carbon nanotubes on glass

被引:2290
作者
Ren, ZF
Huang, ZP
Xu, JW
Wang, JH
Bush, P
Siegal, MP
Provencio, PN
机构
[1] SUNY Buffalo, Mat Synth Lab, Dept Phys, Buffalo, NY 14260 USA
[2] SUNY Buffalo, Mat Synth Lab, Dept Chem, Buffalo, NY 14260 USA
[3] SUNY Buffalo, Ctr Adv Photon & Elect Mat, Buffalo, NY 14260 USA
[4] SUNY Buffalo, Instrumentat Ctr, Buffalo, NY 14214 USA
[5] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
D O I
10.1126/science.282.5391.1105
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Free-standing aligned carbon nanotubes have previously been grown. above 700 degrees C on mesoporous silica embedded with iron nanoparticles. Here, carbon nanotubes aligned over areas up to several square centimeters were grown on nickel-coated glass below 666 degrees C by plasma-enhanced hot filament chemical vapor deposition. Acetylene gas was used as the carbon source and ammonia gas was used asa catalyst and dilution gas. Nanotubes with controllable diameters from 20 to 400 nanometers and lengths from 0.1 to 50 micrometers were obtained. Using this method, large panels of aligned carbon nanotubes can be made under conditions that are suitable for device fabrication.
引用
收藏
页码:1105 / 1107
页数:3
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