Deposition stages and applications of CAE multicomponent coatings

被引:15
作者
Eizner, BA
Markov, GV
Minevich, AA
机构
[1] Byelorussian Academy of Sciences, Physical Technical Institute, Minsk 220141
关键词
cathodic are evaporation; multicomponent coatings; ion cleaning; cathode erosion; structure formation;
D O I
10.1016/0257-8972(95)02427-1
中图分类号
TB3 [工程材料学];
学科分类号
0805 [材料科学与工程]; 080502 [材料学];
摘要
This paper concerns the main physical processes in cathodic are plasma deposition of multicomponent coatings by means of composite cathodes. The following processes are investigated: (1) surface cleaning by ion bombardment; (2) erosion of composite cathodes; (3) generation and acceleration of multicomponent ion flows; and (4) coating growth. Also discussed are three applications of industrial technologies: heat-resistant coatings (NiCrAlSiBY) for gas turbines, erosion-resistant coatings (Ti-Si-N) for compressor blades, and wear-resistant coatings ((Ti,Al)N, Al-Si-N) for cutting tools.
引用
收藏
页码:178 / 191
页数:14
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