RF micromachined varactors with wide tuning range

被引：6

作者：

Dec, A ^{[1
]}

Suyama, K ^{[1
]}

机构：

[1] Columbia Univ, Dept Elect Engn, New York, NY 10027 USA

来源：

1998 IEEE RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC) SYMPOSIUM | 1998年

关键词：

D O I：

10.1109/RFIC.1998.682340

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Polysilicon surface micromachined varactors using two- and three-plate structures with 1.5:1 and 1.87:1 tuning ranges, respectively, are presented. The tuning ranges are near-theoretical limits and can be obtained within 4.4 V control voltage. The two-plate varactor has a nominal capacitance of 2.05 pF and a Q-factor of 20 at 1 GHz.

引用

页码：309 / 312

页数：4