The low-pressure positive column in electronegative gases including space charge-matching plasma and sheath

被引:48
作者
Franklin, RN [1 ]
Snell, J [1 ]
机构
[1] City Univ London, London EC1V 0HB, England
关键词
D O I
10.1088/0022-3727/31/19/026
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper describes the low-pressure positive column in electronegative gases laking into account space charge effects. It shows how the plasma joins to the sheath via a transition layer as in electropositive gases, but also demonstrates significant differences in the particle and potential distributions and the scale of the sheath. The treatment is in the main computational, but is related to the analytical sheath approximation and to the plasma approximation. The application of matched asymptotic expansions to the problem is also considered. The analogous situation in two-electron-temperature plasmas is also treated.
引用
收藏
页码:2532 / 2542
页数:11
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