Superplastic nanoforming of Pd-based amorphous alloy

被引：176

作者：

Saotome, Y

Itoh, K

Zhang, T

Inoue, A

机构：

[1] Gunma Univ, Dept Mech Engn, Kiryu, Gumma 3768515, Japan

[2] Gunma Univ, Dept Elect Engn, Kiryu, Gumma 3768515, Japan

[3] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan

来源：

SCRIPTA MATERIALIA | 2001年 / 44卷 / 8-9期

关键词：

metal forming; atomic force microscopy; metallic glasses; superplasticity; micro-forming;

D O I：

10.1016/S1359-6462(01)00837-5

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A precision forming process of microelectromechanical systems (MEMS) parts was described. The forming process was via superplastic microforming of metallic glasses. The Pd-based amorphous alloys were used and were found to be useful for high-performance micro-actuators and microstructures. The macroscopic and microscopic deformation behavior was investigated in the supercooled liquid temperature range.

引用

页码：1541 / 1545

页数：5