Off-specular reflectivity study of sputter-deposition of platinum during growth

被引：16

作者：

You, H

Huang, KG

Kampwirth, RT

机构：

[1] Materials Science Division, Argonne National Laboratory, Arqonne

来源：

PHYSICA B | 1996年 / 221卷 / 1-4期

关键词：

D O I：

10.1016/0921-4526(95)00908-6

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

A series of off-specular diffuse scattering measurements were performed by scanning the detector parallel to the sample surface during growth of platinum films on polished silicon substrates. During early stage of island growth, we observe a halo of diffuse scattering around the specular reflection which is similar in origin to Henzler's ring (P. Hahn, J. Clabes and M. Henzler, J. Appl. Phys. 51 (1980) 2079). A model of random islands was developed to explain the halo of diffuse scattering. During late growth, the film surface was consistent with a partially self-affine surface.

引用

页码：77 / 85

页数：9

共 7 条

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