Three-axis capacitive accelerometer with uniform axial sensitivities

被引：47

作者：

Mineta, T ^{[1
]}

Kobayashi, S ^{[1
]}

Watanabe, Y ^{[1
]}

Kanauchi, S ^{[1
]}

Nakagawa, I ^{[1
]}

Suganuma, E ^{[1
]}

Esashi, M ^{[1
]}

机构：

[1] TOHOKU UNIV,FAC ENGN,AOBA KU,SENDAI,MIYAGI 98077,JAPAN

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1996年 / 6卷 / 04期

关键词：

D O I：

10.1088/0960-1317/6/4/010

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed using a micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can be detected by parallel shift and tilt of a seismic mass, respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by a three-dimensional sensor structure.

引用

页码：431 / 435

页数：5