Low noise high-temperature superconducting bolometers for infrared imaging

被引:39
作者
Berkowitz, SJ [1 ]
Hirahara, AS [1 ]
Char, K [1 ]
Grossman, EN [1 ]
机构
[1] NIST,BOULDER,CO 80303
关键词
D O I
10.1063/1.117174
中图分类号
O59 [应用物理学];
学科分类号
摘要
High-temperature superconducting bolometric infrared detectors offer the promise of matching the sensitivity of HgCdTe detectors, but with an extended detection range to longer wavelengths (lambda >15 mu m). We fabricated high-temperature superconducting bolometers using an all-epitaxial micromachining technology based upon a YBa2Cu3Ox thin film on a yttria-stabilized zirconia free-standing 50X50 mu m(2) membrane supported on a LaAlO3 substrate. This structure has simultaneously a low thermal conductance and a low heat capacity. Using this technology, we have made array-compatible pixels for infrared camera applications with optical noise equivalent powers as low as 6.3 X 10(-13) W/root Hz at 32 Hz. Over more than 1 octave of frequency range, these bolometers are limited by fundamental (chiefly phonon) noise sources rather than excess him noise. (C) 1996 American Institute of Physics.
引用
收藏
页码:2125 / 2127
页数:3
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