Dual-source chemical vapour deposition of strontium and zirconium β-diketonates for strontium zirconate perovskite films

被引：5

作者：

Andrieux, M

Viallet, V

Le Stum, M

Rapenne, L

Ghysel, M

Haut, C

Condat, M

机构：

[1] Univ Orsay, CNRS, UMR 8647, Lab Etud Mat Hors Equillibre, F-91410 Orsay, France

[2] Univ Orsay, ICMMO, LPCES, F-91410 Orsay, France

来源：

APPLIED SURFACE SCIENCE | 2004年 / 222卷 / 1-4期

关键词：

strontium zirconate; MOCVD; perovskite oxide; phase diagram;

D O I：

10.1016/j.apsusc.2003.09.026

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Strontium zirconate perovskite thin films were deposited on Si(1 0 0) substrates by metal organic chemical vapour deposition (MOCVD) in a cold wall reactor using direct injection process of two beta-diketonates precursors. Oxide growth was observed over a temperature ranging from 700 to 1000 degreesC and various metal Sr/Zr ratios in the solution. Using peculiar experimental conditions, an orthorhombic strontium zirconate (SrZrO3(o)) phase is obtained. The results on the films are discussed in relation with the bulk ZrO2-SrO pseudo binary equilibrium phase diagram existing on this compound. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：351 / 356

页数：6

共 16 条

[1] Epitaxial growth of Y-doped SrZrO3 films on MgO by pulsed laser deposition [J].