Angular distributions of particles sputtered from polycrystalline platinum

The angular distributions of sputtered particles for 3-10 keV argon-ion bombardment of polycrystalline platinum at normal incidence have been investigated both experimentally and by computer simulation using the program TRIM.SP. Two types of targets were used. One is a fine-grained Pt polycrystal, the other is rolled sheet Pt. The angular distributions were measured applying RES of the material deposited on a collector. For fine-grained platinum the angular distributions are cupola shaped and slightly overcosine. For rolled platinum the distributions are much more overcosine with a strong central Wehner spot due to the texture caused by rolling. Results from computer simulation show that the effect of the surface binding energy on the shape of the angular distribution is negligible. The dependence of the shape of the angular distribution on the ion energy interval from 3.5 to 10 keV was also found to be very weak. Good agreement has been found between the experimental and computed results for fine-grained platinum. (C) 1998 Elsevier Science B.V.