Formation of multilayer strained-layer heterostructures by liquid epitaxy. II. Simulation of the fabrication of heterostructures based on indium-arsenic-antimony-bismuth solid solutions

被引:1
作者
Akchurin, RK [1 ]
Komarov, DV
机构
[1] MV Lomonosov Moscow State Acad Fine Chem Technol, Moscow 117571, Russia
[2] Inst Chem Problems Microelect, Moscow 117571, Russia
关键词
Solid Solution; Laminar Flow; Sharp Increase; Active Layer; Minimal Thickness;
D O I
10.1134/1.1258715
中图分类号
O59 [应用物理学];
学科分类号
摘要
The formation of InAs1-x-ySbxBiy /InSb and InAs1-x-ySbxBiy/InSbyBiy strained-layer heterostructures by ''capillary'' LPE is simulated. The laws governing the dependence of the gap width E-g and the thickness d of the epilayers on the conditions of the process are revealed. It is shown that because of the sharp increase in the rate of epitaxial deposition as the LPE temperature is raised, the successful growth of epilayers of subcritical thickness is possible only up to T<550 K. The influence of the rate of laminar flow of the liquid in the growth channel in a relaxation regime and in a continuous pumping regime on the uniformity of the distribution of E-g and d in the epitaxial heterostructures is analyzed. Effective combinations of parameters for carrying out the process, which ensure the achievement of E-g approximate to 0.1 eV (77 K) in the active layers with variable-band-gap layers of minimal thickness, are established. (C) 1997 American Institute of Physics. [S1063-7842(97)01007-6].
引用
收藏
页码:762 / 768
页数:7
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