Fabrication of the aligned and patterned carbon nanotube field emitters using the anodic aluminum oxide nano-template on a Si wafer

被引:37
作者
Jeong, SH [1 ]
Lee, KH [1 ]
机构
[1] Pohang Univ Sci & Technol, POSTECH, Dept Chem Engn, Div Elect & Comp Engn, Pohang 790784, Kyungbuk, South Korea
关键词
carbon nanotube; anodic aluminum oxide; field emission;
D O I
10.1016/S0379-6779(03)00187-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Aligned and patterned carbon nanotubes (CNTs) have been fabricated via catalytic chemical vapor deposition (CVD) with anodic aluminum oxide (AAO) nano-template. AAO nano-templates were prepared on the Nb-pattemed silicon wafer by anodization process. After the cobalt catalyst had been electrochemically deposited at the pore bottom of the AAO nano-template on Nb pattern, CNTs were grown by chemical vapor deposition of 10% acetylene and 20% hydrogen in an argon carrier gas at 650degreesC. Selectively grown CNTs from Nb pattern, standing normally on the AAO nano-templates, were observed. The diameter of CNTs was 60-90 nm and similar to the diameter of AAO nano-template. The density of aligned CNTs was in the order of 10(7)-10(8) cm(-2). Preparation of AAO nano-template on Nb-pattemed wafer and growth characteristics of CNTs in the AAO nano-template are presented. The field emission measurement on the patterned CNTs showed a turn-on field of 2.3 V/mum and a field enhancement factor of 4200. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:385 / 390
页数:6
相关论文
共 34 条
[1]   Field emission from single-wall carbon nanotube films [J].
Bonard, JM ;
Salvetat, JP ;
Stockli, T ;
de Heer, WA ;
Forro, L ;
Chatelain, A .
APPLIED PHYSICS LETTERS, 1998, 73 (07) :918-920
[2]   Field emission from carbon nanotubes:: perspectives for applications and clues to the emission mechanism [J].
Bonard, JM ;
Salvetat, JP ;
Stöckli, T ;
Forró, L ;
Châtelain, A .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (03) :245-254
[3]   Plasma-induced alignment of carbon nanotubes [J].
Bower, C ;
Zhu, W ;
Jin, SH ;
Zhou, O .
APPLIED PHYSICS LETTERS, 2000, 77 (06) :830-832
[4]   Electronic structure and localized states at carbon nanotube tips [J].
Carroll, DL ;
Redlich, P ;
Ajayan, PM ;
Charlier, JC ;
Blase, X ;
DeVita, A ;
Car, R .
PHYSICAL REVIEW LETTERS, 1997, 78 (14) :2811-2814
[5]   Carbon nanotubule membranes for electrochemical energy storage and production [J].
Che, GL ;
Lakshmi, BB ;
Fisher, ER ;
Martin, CR .
NATURE, 1998, 393 (6683) :346-349
[6]   Nanotube nanodevice [J].
Collins, PG ;
Zettl, A ;
Bando, H ;
Thess, A ;
Smalley, RE .
SCIENCE, 1997, 278 (5335) :100-103
[7]   Field emitters based on porous aluminum oxide templates [J].
Davydov, DN ;
Sattari, PA ;
AlMawlawi, D ;
Osika, A ;
Haslett, TL ;
Moskovits, M .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (07) :3983-3987
[8]   Current saturation mechanisms in carbon nanotube field emitters [J].
Dean, KA ;
Chalamala, BR .
APPLIED PHYSICS LETTERS, 2000, 76 (03) :375-377
[9]   ALIGNED CARBON NANOTUBE FILMS - PRODUCTION AND OPTICAL AND ELECTRONIC-PROPERTIES [J].
DEHEER, WA ;
BACSA, WS ;
CHATELAIN, A ;
GERFIN, T ;
HUMPHREYBAKER, R ;
FORRO, L ;
UGARTE, D .
SCIENCE, 1995, 268 (5212) :845-847
[10]   A CARBON NANOTUBE FIELD-EMISSION ELECTRON SOURCE [J].
DEHEER, WA ;
CHATELAIN, A ;
UGARTE, D .
SCIENCE, 1995, 270 (5239) :1179-1180