Continuous-wave emission in the ultraviolet from diatomic excimers in a microdischarge

被引：33

作者：

Frame, JW ^{[1
]}

John, PC ^{[1
]}

De Temple, TA ^{[1
]}

Eden, JG ^{[1
]}

机构：

[1] Univ Illinois, Everitt Lab, Dept Elect & Comp Engn, Urbana, IL 61801 USA

来源：

APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 21期

关键词：

D O I：

10.1063/1.121439

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Emission on the I-2 (D'-->A'), XeI (B(2)Sigma(1/2)(+)-->X(2)Sigma(1/2)(+)) and XeO (2 (3)Pi-->1 (3)Pi) bands, peaking in the ultraviolet at 342, 253 and 238 nm, respectively, has been generated on a continuous basis in a microdischarge with a static gas fill. Discharges are produced in Kr/I-2, Xe/I-2, or Xe/O-2 gas mixtures by cylindrical devices 400 mu m in diameter and fabricated in silicon. Rare-gas-halide and -oxide microdischarge lamps are attractive ultraviolet or vacuum ultraviolet sources and XeI, in particular, appears to be a potential replacement for Hg resonance line radiation (253.7 nm). (C) 1998 American Institute of Physics.

引用

页码：2634 / 2636

页数：3

共 21 条

[1] THE ADSORPTION OF I2 ON SI(111)-7X7 STUDIED BY SOFT-X-RAY PHOTOEMISSION [J].

CHAKARIAN, V ;

SHUH, DK ;

YARMOFF, JA ;

HAKANSSON, MC ;

KARLSSON, UO .

SURFACE SCIENCE, 1993, 296 (03) :383-392

[2]

EDEN JG, 1992, PHOTOCHEMICAL VAPOR, P34

[3] UV EXCIMER RADIATION FROM DIELECTRIC-BARRIER DISCHARGES [J].

ELIASSON, B ;

KOGELSCHATZ, U .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1988, 46 (04) :299-303

[4] Microdischarge devices fabricated in silicon [J].

Frame, JW ;

Wheeler, DJ ;

DeTemple, TA ;

Eden, JG .

APPLIED PHYSICS LETTERS, 1997, 71 (09) :1165-1167

[5] DRY ETCHING OF SINGLE-CRYSTAL SILICON TRENCH IN HYDROGEN IODIDE CONTAINING PLASMAS .1. PURE HI [J].

FRANK, WE ;

CHABERT, T .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (02) :490-495

[6] HIGH-EFFICIENCY KRF EXCIMER FLASHLAMP [J].

GERBER, T ;

LUTHY, W ;

BURKHARD, P .

OPTICS COMMUNICATIONS, 1980, 35 (02) :242-244

[7] VACUUM UV EMISSION FROM REACTIONS OF METASTABLE INERT-GAS ATOMS - CHEMILUMINESCENCE OF ARO AND ARCL [J].

GOLDE, MF ;

THRUSH, BA .

CHEMICAL PHYSICS LETTERS, 1974, 29 (04) :486-490

[8] OBSERVATION OF CONTINUOUS KRCL EXCIMER FLUORESCENCE IN MICROWAVE DISCHARGES EMPLOYING BINARY-MIXTURES OF KR AND CL-2 [J].

HASSAL, SB ;

BALLIK, EA .

CANADIAN JOURNAL OF PHYSICS, 1991, 69 (06) :699-701

[9] DISCHARGE-EXCITED FREE JET SOURCE OF RARE GAS-HALIDE AND OXIDE MOLECULES [J].

JONES, RB ;

SCHLOSS, JH ;

EDEN, JG .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (04) :1674-1682

[10] EXCITATION-SPECTRA FOR THE PHOTOASSOCIATION OF KR-F AND XE-I COLLISION PAIRS IN THE ULTRAVIOLET (208-258-NM) [J].

JONES, RB ;

SCHLOSS, JH ;

EDEN, JG .

JOURNAL OF CHEMICAL PHYSICS, 1993, 98 (06) :4317-4334

← 1 2 3 →