Friction and pull-off forces on submicron-size asperities

被引:69
作者
Ando, Y
Ino, J
机构
[1] Mech Engn Lab, Tsukuba, Ibaraki 305, Japan
[2] Chuo Univ, Bunkyo Ku, Tokyo, Japan
关键词
friction force; pull-off force; JKR theory; radius of curvature; AFM; focused ion beam;
D O I
10.1016/S0043-1648(97)00158-0
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
We measured the friction and pull-off forces between an atomic force microscope (AFM) probe and submicron-size asperities of various radii of curvature on a silicon wafer. First, we used a focused ion beam to produce two types of asperities: two-dimensional arrays in which asperities were arranged at uniform intervals of 240 nm, and independent asperities in which the distance between adjacent peaks was approximately 3 mu m. The arrays were made by milling grooves of various depths (3.2 to 49.2 nm) in two perpendicular directions at uniform intervals. Areas in contact with the probe had radii of curvature from 86 to 792 nm, depending on the asperity. The independent asperities were made by milling an area around a point in a step-like form and had radii of curvature from 71 to 941 nm. The tip of the AFM probe had a flat square surface measuring 0.7 X 0.7 mu m(2). On all asperities measured, both the friction and pull-off forces were proportional to the radius of curvature of the tip of the asperity, irrespective of the micro-surface roughness of the asperity. The friction force was proportional to the pull-off force. The radius of curvature of the tip of an independent asperity was determined by approximating the tip as a spherical surface. When this spherical surface was set greater than the contact area, the friction and pull-off forces were proportional to the radius of curvature. This verified that the surface tension due to capillary force around the contact area was the predominant component of the adhesion force. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:115 / 122
页数:8
相关论文
共 15 条
  • [1] Friction characteristics and adhesion force under low normal load
    Ando, Y
    Ishikawa, Y
    Kitahara, T
    [J]. JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1995, 117 (04): : 569 - 574
  • [2] ANDO Y, 1993, JAPANESE J TRIBOLOGY, V38, P1225
  • [3] BURGETT SR, 1992, MICROMECHANICAL SYST, V40, P1
  • [4] EFFECT OF CONTACT DEFORMATIONS ON ADHESION OF PARTICLES
    DERJAGUIN, BV
    MULLER, VM
    TOPOROV, YP
    [J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1975, 53 (02) : 314 - 326
  • [5] EFFECT OF SURFACE-ROUGHNESS ON ADHESION OF ELASTIC SOLIDS
    FULLER, KNG
    TABOR, D
    [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1975, 345 (1642): : 327 - 342
  • [6] Hermansson K., 1991, TRANSDUCERS '91. 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (Cat. No.91CH2817-5), P193, DOI 10.1109/SENSOR.1991.148835
  • [7] MEASUREMENT OF VANDERWAALS DISPERSION FORCES IN RANGE 1.5 TO 130 NM
    ISRAELAC.JN
    TABOR, D
    [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1972, 331 (1584) : 19 - +
  • [8] Israelachvili J., 1985, Intermolecular and Surface Forces
  • [9] SURFACE ENERGY AND CONTACT OF ELASTIC SOLIDS
    JOHNSON, KL
    KENDALL, K
    ROBERTS, AD
    [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1971, 324 (1558): : 301 - &
  • [10] HEAT OF IMMERSION OF SILICON-NITRIDE
    LI, J
    HATTORI, M
    [J]. THERMOCHIMICA ACTA, 1985, 88 (01) : 267 - 272