A modified Chang-Brown model for the determination of the dopant distribution in a Bridgman-Stockbarger semiconductor crystal growth system

被引:6
作者
Balint, AM
Mihailovici, MM
Baltean, DG
Balint, S
机构
[1] Univ W Timisoara, Dept Phys, Timisoara 1900, Romania
[2] Univ W Timisoara, Dept Math, Timisoara 1900, Romania
关键词
computer simulation; convection; diffusion; heat transfer; interfaces; segregation;
D O I
10.1016/S0022-0248(01)01334-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In this paper. we start from the Chang-Brown model which allows computation of Row, temperature and dopant concentration in a vertical Bridgman-Stockbarger semiconductor growth system, The modifications made by us concern the melt/solid interface, Namely, we assume that the phase transition does not take place on a Rat mathematical surface, but in a thin region (the so-called precrystallization-zone), masking the crystal, where both phases, liquid and solid. co-exist. We deduce for this zone new effective equations which govern flow, heat and dopant transport and make the coupling of these equations with these governing the same phenomena in the pure melt. We compute Row, temperature and dopant concentration for crystal and melt with thermophysical properties similar to gallium-doped germanium using the modified Chang-Brown model and compare the results to those obtained using the Chang-Brown model. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:195 / 201
页数:7
相关论文
共 8 条
[1]  
Balint AM, 2000, COMPUTAT STUDIES, V3, P43
[2]  
BALTEAN D, 1999, THESIS U PARIS 6
[3]   RADIAL SEGREGATION INDUCED BY NATURAL-CONVECTION AND MELT SOLID INTERFACE SHAPE IN VERTICAL BRIDGMAN GROWTH [J].
CHANG, CJ ;
BROWN, RA .
JOURNAL OF CRYSTAL GROWTH, 1983, 63 (02) :343-364
[4]   DIFFUSION, CONVECTION, ADSORPTION, AND REACTION OF CHEMICALS IN POROUS-MEDIA [J].
HORNUNG, U ;
JAGER, W .
JOURNAL OF DIFFERENTIAL EQUATIONS, 1991, 92 (02) :199-225
[5]   FLUID-FLOW THROUGH AN ARRAY OF FIXED PARTICLES [J].
LEVY, T .
INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE, 1983, 21 (01) :11-23
[6]   Some applications of the homogenization theory [J].
Mei, CC ;
Auriault, JL ;
Ng, CO .
ADVANCES IN APPLIED MECHANICS, VOL 32, 1996, 32 :277-348
[7]  
PRASAD V, 1991, NATO ADV SCI I E-APP, V196, P563
[8]  
SANCHEZPALENCIA E, 1980, LECT NOTES PHYSICS, V127