[1] Soochow Univ, Dept Chem Engn, SIP, Suzhou 215123, Peoples R China
[2] Soochow Univ, Key Lab Organ Synth Jiangsu Prov, SIP, Suzhou 215123, Peoples R China
[3] IBM Corp, HYDA, Rochester, MN 55901 USA
[4] Univ New Brunswick, Dept Chem Engn, Fredericton, NB E3B 5A3, Canada
[5] Carl Zeiss SMT Inc, Nano Technol Syst Div, Thornwood, NY 10594 USA