Near-surface laser-vapour coupling in nanosecond pulsed laser ablation

被引:36
作者
Gusarov, AV
Smurov, I
机构
[1] Russian Acad Sci, AA Baikov Met Inst, Moscow 119991, Russia
[2] Ecole Natl Ingn St Etienne, F-42023 St Etienne, France
关键词
D O I
10.1088/0022-3727/36/23/016
中图分类号
O59 [应用物理学];
学科分类号
摘要
The evaporation mechanism at high temperatures is one of the disputable points of the conventional thermal model of laser ablation connecting heat transfer in the target with gas-phase dynamics. A model of supercritical ablation is proposed where the vapour density is limited by a transparency condition. The model is basically laser-vapour coupling in a thin near-surface layer. The experiments on ablation of Au at 193 and 266 nm, Al at 266 nm, and graphite at 1.06 mum can be described by the proposed model. However, optical breakdown is important in graphite ablation at 193 and 248 nm. When the target surface temperature is less than the critical one (typically at fluences less than or about several J cm(-2)) the thermal evaporation mechanism works. At higher laser fluences it has been found that a combination of the proposed supercritical ablation mechanism with optical breakdown in the volume of the gas phase is more realistic.
引用
收藏
页码:2962 / 2971
页数:10
相关论文
共 35 条
[1]  
ANISIMOV SI, 1968, SOV PHYS JETP-USSR, V27, P182
[2]   NUMERICAL-ANALYSIS OF GAS-FLOWS CONDENSING ON ITS PLANE CONDENSED PHASE ON THE BASIS OF KINETIC-THEORY [J].
AOKI, K ;
SONE, Y ;
YAMADA, T .
PHYSICS OF FLUIDS A-FLUID DYNAMICS, 1990, 2 (10) :1867-1878
[3]   NEAR-THRESHOLD LASER SPUTTERING OF GOLD [J].
BENNETT, TD ;
GRIGOROPOULOS, CP ;
KRAJNOVICH, DJ .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (02) :849-864
[4]  
BRESLAVSKY PV, 1992, MATH MODELING PROCES
[5]   Low fluence laser sputtering of gold at 532 nm [J].
Elam, JW ;
Levy, DH .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (01) :539-541
[6]  
Glushko V.P., 1978, Thermodynamic Properties of Individual Substances,Reference Book
[7]  
GLUSHKO VP, 1973, THERMAL CONSTANTS SU
[8]  
Grigoriev I., 1991, PHYSICAL QUANTITIES
[9]   Gas dynamics of laser ablation: Influence of ambient atmosphere [J].
Gusarov, AV ;
Gnedovets, AG ;
Smurov, I .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (07) :4352-4364
[10]   Gas-dynamic boundary conditions of evaporation and condensation: Numerical analysis of the Knudsen layer [J].
Gusarov, AV ;
Smurov, I .
PHYSICS OF FLUIDS, 2002, 14 (12) :4242-4255