Growth of thin films of molybdenum and tungsten oxides by combustion CVD using aqueous precursor solutions

被引:24
作者
Davis, MJ [1 ]
Benito, G [1 ]
Sheel, DW [1 ]
Pemble, ME [1 ]
机构
[1] Univ Salford, Inst Mat Res, Salford M5 4WT, Lancs, England
关键词
D O I
10.1002/cvde.200306260
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Using combustion (C) CVD, layers of molybdenum and tungsten oxides have been deposited on glass and silicon at low temperatures. Inexpensive ammonium salts of molybdate and metatungstate ions were used as precursors and were delivered to the coating flame as an aqueous solution using a nebulizer. The resulting films were analyzed by scanning electron microscopy (SEM), energy-dispersive analysis of X-rays (EDAX), Rutherford backscattering (RBS), X-ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD). These indicated that the films were continuous, moderately smooth, and consisted of amorphous, disordered molybdenum and tungsten trioxides.
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收藏
页码:29 / 34
页数:6
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