Diode laser bonding of planar microfluidic devices, MOEMS, biomems, diagnostic chips & microarrays

The assembly of plastic microfluidic devices, MOEMS and microarrays requiring high positioning and welding accuracy in the micrometer range, has been successfully achieved using a new technology based on laser transmission welding combined with a photolithographic mask technique. This paper reviews a laser assembly platform for the joining of microfluidic plastic parts with its main related process characteristics and its potential for low-cost and high volume manufacturing. The system consists of a of diode laser with a mask and an automated alignment function to generate micro welding seams with freely definable geometries. A fully automated mask alignment system with a resolution of < 2 mm and a precise, non-contact energy input allows a fast welding of micro structured plastic parts with high reproducibility and excellent welding quality.