Sub-ppm NO2 sensors based on nanosized thin films of titanium-tungsten oxides

被引:55
作者
Nelli, P [1 ]
Depero, LE [1 ]
Ferroni, M [1 ]
Groppelli, S [1 ]
Guidi, V [1 ]
Ronconi, F [1 ]
Sangaletti, L [1 ]
Sberveglieri, G [1 ]
机构
[1] UNIV FERRARA,DEPT PHYS,INFM,I-44100 FERRARA,ITALY
关键词
titanium-tungsten oxide; thin film; NO2; sensor;
D O I
10.1016/0925-4005(96)80021-9
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We describe the preparation of thin films of Ti-WO3 obtained by means of r.f. sputtering deposition followed by a thermal oxidation. The sensing characteristics of these thin films were obtained by measuring the response towards NO2 in the interval 0.5-20 ppm and to other interfering gases like ethyl alcohol, CH4 and CO; the influence of water vapour to the response towards NO2 was also investigated. The material seems to be a promising detector of NO2 for environmental monitoring.
引用
收藏
页码:89 / 92
页数:4
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