Sub-ppm NO2 sensors based on nanosized thin films of titanium-tungsten oxides

被引：55

作者：

Nelli, P ^{[1
]}

Depero, LE ^{[1
]}

Ferroni, M ^{[1
]}

Groppelli, S ^{[1
]}

Guidi, V ^{[1
]}

Ronconi, F ^{[1
]}

Sangaletti, L ^{[1
]}

Sberveglieri, G ^{[1
]}

机构：

[1] UNIV FERRARA,DEPT PHYS,INFM,I-44100 FERRARA,ITALY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 31卷 / 1-2期

关键词：

titanium-tungsten oxide; thin film; NO2; sensor;

D O I：

10.1016/0925-4005(96)80021-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We describe the preparation of thin films of Ti-WO3 obtained by means of r.f. sputtering deposition followed by a thermal oxidation. The sensing characteristics of these thin films were obtained by measuring the response towards NO2 in the interval 0.5-20 ppm and to other interfering gases like ethyl alcohol, CH4 and CO; the influence of water vapour to the response towards NO2 was also investigated. The material seems to be a promising detector of NO2 for environmental monitoring.

引用

页码：89 / 92

页数：4

共 8 条

[1] AKIYAMA M, CHEM LETT, V1911, P1611
[2] Kinetics of disorder-order transition of Ti-W oxide thin-film sensors
Depero, LE
Natali Sora, I
Perego, C
Sangaletti, L
Sberveglieri, G
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1996, 31 (1-2) : 19 - 24
[3] DEPERO LE, IN PRESS J CHEM PHYS
[4] INOUE T, 1994, TECH DIG 5 IMCS ROM, P490
[5] WO3 SPUTTERED THIN-FILMS FOR NOX MONITORING
SBERVEGLIERI, G
DEPERO, L
GROPPELLI, S
NELLI, P
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) : 89 - 92
[6] METHODS FOR THE PREPARATION OF NO, NO2 AND H-2 SENSORS BASED ON TIN OXIDE THIN-FILMS, GROWN BY MEANS OF THE RF MAGNETRON SPUTTERING TECHNIQUE
SBERVEGLIERI, G
FAGLIA, G
GROPPELLI, S
NELLI, P
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1992, 8 (01) : 79 - 88
[7] SBERVEGLIERI G, UNPUB
[8] TAMAKI J, 1989, SURF SCI, V221, P183, DOI 10.1016/0039-6028(89)90574-8

← 1 →